Climate change and sustainable development have become international issues, and advanced regions are actively adopting green products in order to bring new developments to the economy. Under the green tide, in order to assist the Taiwan industry to strive for international energy-saving business opportunities, the National Experimental Research Institute Instrument Technology Research Center (referred to as the Instrument Center) optical system integration research and development alliance, combined with Yujie Vacuum Technology and Mingzhi University of Science and Technology Professor Chen Shengji's production, research and research of Sanfang Energy, the development of Zirconium Diboride (ZrB2) buffer layer process technology and equipment for growing gallium nitride film on tantalum substrate, can reduce LED process cost by 30, and extend LED service life by 25. Enhance the international competitive advantage of Taiwan's green energy industry. LED light source has the advantages of power saving, small size and long life. With the expansion of lighting application, it has already rushed to the wave of green trend. According to the statistics of research institutions, Taiwan's LED lighting industry has already taken the lead in the world. However, LED technology is changing with each passing day, and competitors, South Korea and China are more policy-supporting, showing strong intentions, and can predict the future global LED lighting industry competition. It will be more intense. In the face of international strong enemies, Taiwan's LED industry needs to continue to enhance its technological competitiveness in order to maintain its advantages. At present, LED still has high unit price and high cost limitation in the lighting market, and heat treatment has always been a key technology that needs to be further overcome. Traditional LEDs are mainly grown on sapphire wafers (Sapphire, Al2O3) or tantalum carbide (SiC) substrates. The instrument center integrates the R&D alliance through optical systems, successfully matching the Mingzhike Brigade and Yujie Vacuum. The Tripartite Cooperative Implementation Department of Science and Technology applied to the development of the industry-university cooperation program for the development of a zirconium diboride buffer film process for the deposition of gallium nitride thin films on germanium substrates, and the development of a zirconium diboride buffer layer for gallium nitride thin films grown on germanium substrates. Process technology. This technology allows GaN to be deposited on a silicon wafer substrate that has been widely used in the semiconductor industry, which not only reduces the cost, but also increases the thermal conductivity and improves the heat dissipation efficiency, so it is of great commercial value. The operation mode of this industry research is to use the pulsed DC magnetron sputtering equipment to plate the zirconium diboride film on the enamel substrate to develop the buffer layer; the Mingzhike team is responsible for the film material structure and crystal phase analysis; Yujie Vacuum is a vacuum equipment system integrated manufacturing and vacuum components development and manufacturing equipment company, responsible for the research and development of commercial machine testing and verification, and related equipment integration research and development, the establishment of Taiwan's vacuum coating equipment independent research and development capabilities. According to the development trend of the global green energy industry, the LED industry will grow rapidly in the next five years. Therefore, it is actively developing forward-looking industrial technologies and taking the lead in breaking through the current industrial technology bottlenecks as national goals. The cooperation between the Instrument Center, Mingzhi Keda and Yujie Vacuum will strengthen Taiwan's competitive advantage in the LED industry, ensure global leadership, and enhance the technical level of Taiwan's semiconductor process equipment manufacturers, leading the Taiwan industry to high value applications. development of.
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